% activate debug output verbose y experimentName 3D-SIC ======design===================== % no design cost D_nreCost 0 ====== manufacturing ===================== %total production, assume 1 shipped IC M_productionVolume 1 ======manufacturing: wafer===================== %number of dies in stack and their labels M_dieCount 4 M_dieLabelList 1 2 3 4 M_cost_wafer 3000 3000 3000 3000 M_enableArea 1 1 1 1 %the following two keywords are ignored, as the enableArea equals to 1 for all dies % M_diesPerWafer 200 1000 1000 1000 1000 % M_yield_die 0.99 0.99 0.99 0.99 0.99 % information regarding die area and yield % efftive wafer radius, 300 mm with 3 mm edge clearance M_radiusEff a 147 % 4 smaller dies M_dieSize_length 8 8 8 8 M_dieSize_width 8 8 8 8 % clustering and defect density, used to calculate yield M_clustering 0.5 0.5 0.5 0.5 M_defectDensity 0.001 0.005 0.005 0.005 %TSV yields, only top die doesn't have TSVs M_yield_TSV 0.99 0.99 0.99 1.00 % which relation to use between yield, fault coverage and test escapes % in this case equation 1 is used (see manual). M_testEscapeEquation 1 M_stackOp1 1-2 | W2D, B2F M_stackOp2 1-3 | W2D, B2F M_stackOp3 1-4 | W2D, B2F % all stacking operation (three in this example) are assumed to be 10 cent M_cost_stackOp a 0.10 %the yield of the dies during stacking M_yield_die_stackOp1 0.99 0.99 1.00 1.00 M_yield_die_stackOp2 1.00 0.99 0.99 1.00 M_yield_die_stackOp3 1.00 1.00 0.99 0.99 %the yield of the interconnects during stacking M_yield_int_stackOp1 0.99 1.00 1.00 M_yield_int_stackOp2 1.00 0.99 1.00 M_yield_int_stackOp3 1.00 1.00 0.99 ======packaging===================== %packaging 2.00 per 3D-SIC with 100% yield P_cost 2.00 P_yield_die a 1 P_yield_int a 1 ====== test ============================ ======== test order ========= T_testOrder i1 i2 i3 d1 d2 d3 d4 %all dies and interconnects are tested one by one (serially) in the stack T_parallelTest_die {1}{2}{3}{4} T_parallelTest_int {1}{2}{3} ======== test cost die ========= %pre-bond tests for active dies and final test for all dies %no pre-bond inter poster test T_cost_die_prebond 1.50 1.50 1.50 1.50 T_cost_die_stackOp1 0.00 0.00 0.00 0.00 T_cost_die_stackOp2 0.00 0.00 0.00 0.00 T_cost_die_stackOp3 0.00 0.00 0.00 0.00 T_cost_die_packaged 1.50 1.50 1.50 1.50 ======== test cost interconnects ========= %TSVs/microbumps are not tested in the pre-bond phase % interconnects are tested during mid-bond and post-bond % interconnects are tested during final/packaging test T_cost_TSV_prebond 0.00 0.00 0.00 0.00 T_cost_int_stackOp1 0.10 0.00 0.00 T_cost_int_stackOp2 0.00 0.10 0.00 T_cost_int_stackOp3 0.00 0.00 0.10 T_cost_int_packaged 0.10 0.10 0.10 ======== FC die ========= T_fc_die_prebond 0.00 0.99 0.99 0.99 T_fc_die_stackOp1 0.00 0.00 0.00 0.00 T_fc_die_stackOp2 0.00 0.00 0.00 0.00 T_fc_die_stackOp3 0.00 0.00 0.00 0.00 T_fc_die_packaged 0.99 0.99 0.99 0.99 T_fc_TSV_prebond 0.00 0.00 0.00 0.00 T_fc_int_stackOp1 1.00 0.00 0.00 T_fc_int_stackOp2 0.00 1.00 0.00 T_fc_int_stackOp3 0.00 0.00 1.00 T_fc_int_packaged a 1.000000 T_probedDie_stackOp1 1 T_probedDie_stackOp2 1 T_probedDie_stackOp3 1 ======logistics===================== % No logistics cost L_dieBased n L_cost_company2waferfab 0.00 L_cost_waferfab2tester a 0.00 L_cost_tester2fab3D_wafer a 0.00 L_cost_tester2fab3D_stack a 0.00 L_cost_fab3D2tester a 0.00 L_cost_tester2packaging 0.00 L_cost_packaging2tester 0.00 L_cost_tester2company 0.00 L_cost_waferfab2fab3D a 0.00 L_cost_fab3D2packaging 0.00 L_cost_packaging2company 0.00 L_cost_fab3D2fab3D a 0.00 ======sweep ====================== % analyze impact of pre-bond fault coverage and its associated test cost (dim 1) versus its defect density (dim 2). % This is performed for bottom die only Sweep 3 2 SweepParam1 -dim 1 T_cost_die_prebond[1] -b 0.0 -e 0.2 -s 0.02 SweepParam2 -dim 1 T_fc_die_prebond[1] -b 0.0 -e 1.0 -s 0.10 SweepParam3 -dim 2 M_defectDensity[1] -b 0.0002 -e 0.001 -s 0.0002