% activate debug output verbose y experimentName 2.5D-SIC ======design===================== % no design cost D_nreCost 0 ====== manufacturing ===================== %total production, assume 1 shipped IC M_productionVolume 1 ======manufacturing: wafer===================== %number of dies in stack and their labels M_dieCount 4 M_dieLabelList 1 2 3 4 M_cost_wafer 700 3000 3000 3000 M_enableArea 0 0 0 0 M_diesPerWafer 400 1000 1000 1000 M_yield_die 0.99 0.99 0.99 0.99 %TSV yields, they are not used in F2F stacked 2.5D-SICs M_yield_TSV 1.00 1.00 0.95 1.00 % which relation to use between yield, fault coverage and test escapes % in this case equation 0 must be used (see manual). M_testEscapeEquation 0 M_stackOp1 3-4 | D2D, F2B M_stackOp2 1-2 | W2D, F2F M_stackOp3 1-3 | W2D, F2F % all stacking operation (three in this example) are assumed to be 10 cent M_cost_stackOp a 0.10 %the yield of the dies during stacking M_yield_die_stackOp1 1.00 1.00 0.99 0.99 M_yield_die_stackOp2 0.99 0.99 1.00 1.00 M_yield_die_stackOp3 0.99 1.00 0.99 1.00 %the yield of the interconnects during stacking M_yield_int_stackOp1 0.99 1.00 1.00 M_yield_int_stackOp2 1.00 0.99 1.00 M_yield_int_stackOp3 1.00 1.00 0.99 ======packaging===================== %packaging 2.00 per 3D-SIC with 100% yield P_cost 2.00 P_yield_die a 1 P_yield_int a 1 ====== test ============================ ======== test order ========= T_testOrder i1 i2 i3 d1 d2 d3 d4 %all dies and interconnects are tested one by one (serially) in the stack T_parallelTest_die {1}{2}{3}{4} T_parallelTest_int {1}{2}{3} ======== test cost die ========= %pre-bond tests for active dies and final test for all dies %no pre-bond test for bottom die T_cost_die_prebond 0.00 1.50 1.50 1.50 T_cost_die_stackOp1 0.00 0.00 0.00 0.00 T_cost_die_stackOp2 0.00 0.00 0.00 0.00 T_cost_die_stackOp3 0.00 0.00 0.00 0.00 T_cost_die_packaged 0.10 1.50 1.50 1.50 ======== test cost interconnects ========= %TSVs/microbumps are not tested in the pre-bond phase % interconnects are tested during mid-bond and post-bond % interconnects are tested during final/packaging test T_cost_TSV_prebond 0.00 0.00 0.00 0.00 T_cost_int_stackOp1 0.10 0.00 0.00 T_cost_int_stackOp2 0.00 0.10 0.00 T_cost_int_stackOp3 0.00 0.00 0.10 T_cost_int_packaged 0.10 0.10 0.10 ======== FC die ========= T_fc_die_prebond 0.00 0.99 0.99 0.99 T_fc_die_stackOp1 0.00 0.00 0.00 0.00 T_fc_die_stackOp2 0.00 0.00 0.00 0.00 T_fc_die_stackOp3 0.00 0.00 0.00 0.00 T_fc_die_packaged 1.00 0.99 0.99 0.99 % no prebond test (die 3 has a TSV yield) T_fc_TSV_prebond 0.00 0.00 0.00 0.00 T_fc_int_stackOp1 0.00 0.00 0.00 T_fc_int_stackOp2 0.00 0.00 0.00 T_fc_int_stackOp3 0.00 0.00 0.00 T_fc_int_packaged a 1.000000 T_probedDie_stackOp1 1 T_probedDie_stackOp2 1 T_probedDie_stackOp3 1 ======logistics===================== % No logistics cost L_dieBased n L_cost_company2waferfab 0.00 L_cost_waferfab2tester a 0.00 L_cost_tester2fab3D_wafer a 0.00 L_cost_tester2fab3D_stack a 0.00 L_cost_fab3D2tester a 0.00 L_cost_tester2packaging 0.00 L_cost_packaging2tester 0.00 L_cost_tester2company 0.00 L_cost_waferfab2fab3D a 0.00 L_cost_fab3D2packaging 0.00 L_cost_packaging2company 0.00 L_cost_fab3D2fab3D a 0.00 ======sweep ====================== % analyze impact of pre-bond fault coverage and its associated test cost (dim 1) versus its defect density (dim 2). % This is performed for bottom die only Sweep 3 2 SweepParam1 -dim 1 T_cost_die_prebond[1] -b 0.0 -e 0.2 -s 0.02 SweepParam2 -dim 1 T_fc_die_prebond[1] -b 0.0 -e 1.0 -s 0.10 SweepParam3 -dim 2 M_defectDensity[1] -b 0.0002 -e 0.001 -s 0.0002